Perform semi-auto processing

SEMI-AUTO processing allows the operator to control the execution of steps in a specific recipe level. SEMI-AUTO mode can be helpful when attempting to troubleshoot a recipe. A recipe level can be placed in SEMI-AUTO mode when the batch is in MANUAL or AUTO mode. When a batch or step is placed in SEMI-AUTO mode, all higher-level steps are placed in MANUAL mode, and all lower-level steps are placed in AUTO mode. You should select the lowest appropriate level of the recipe and then place it in SEMI-AUTO mode. The step that is active at the time that recipe level is placed in SEMI-AUTO mode is completed, including its subordinate steps. The batch execution then pauses at the next transition as the conditional expression becomes TRUE. The operator will have to issue the RESUME command to initiate the next step of the selected recipe level.

For example, assume you have a recipe with two unit procedures in succession. The first unit procedure consists of three operations; the first two operations run in parallel and the third follows the two parallel operations. Once you start the batch, you place the first unit procedure within this recipe in SEMI-AUTO, which places the procedure in MANUAL. The two parallel operations execute normally, and execution pauses prior to starting the next operation. You then issue the

Resume

command to continue the execution of the batch. However, execution of the batch will halt prior to the third unit procedure. In order to continue execution of the next unit procedure you must place the procedure in AUTO. The batch will then continue to execute normally.

A batch or step may be placed in SEMI-AUTO mode when it is in MANUAL or AUTO mode. A batch may be placed in SEMI-AUTO mode from the following

eProcedure

Client views: Batch List, Equipment and Procedure.

Placing a Batch or Step in SEMI-AUTO Mode